CNC in Semiconductor Equipment Manufacturing Process
1️⃣ Position of CNC in the Semiconductor Industry
In semiconductor equipment manufacturing (such as etching machines, PVD/CVD systems, lithography, vacuum chambers, and wafer transfer modules), CNC machining is responsible for the high-precision manufacturing of key components.
It is part of the mid-to-upstream production stage in the equipment supply chain, where accuracy, cleanliness, and stability are crucial.
2️⃣ CNC Involvement in Manufacturing Stages
Structural Components – Machine frames, chambers, supports, flanges, connectors.
Vacuum Chambers & Precision Parts – Etching/deposition chambers, valve bodies, gas distributors.
Jigs & Fixtures – Assembly, inspection, and positioning tools.
Thermal Modules – Chiller plates, heat exchangers with microchannels.
Motion Components – Arms, linear modules, rotary shafts, and sliders.
3️⃣ CNC Integration with Other Processes
| Process | Integration | Description |
|---|---|---|
| CNC + EDM/ECM | Microhole & conductive machining | Complex hole geometries |
| CNC + Grinding | Surface finishing | Ceramics and SiC parts |
| CNC + 3D Printing | Hybrid manufacturing | Prototyping and cooling modules |
| CNC + Automation | Smart manufacturing | Unmanned machining + metrology feedback |
4️⃣ Applications
| Equipment | CNC Components | Focus |
|---|---|---|
| PVD / CVD | Vacuum chamber, gas distributor | Vacuum sealing, mirror finish |
| Etcher | Chamber, electrode base | Electrical isolation, tolerance |
| CMP | Base frame, bearing seat | Rigidity, parallelism |
| Wafer Handler | Robot arm, base | Precision alignment |
| Metrology Tool | Fixtures, mounts | Structural stability |
5️⃣ Future Trends
- Micro Machining for MEMS and microfluidics
- Digital Twin simulation of CNC processes
- Clean Machining in vacuum environments
- AI-based Optimization for tool wear and compensation
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Yong Yi Technology Co., Ltd.
所在地：台湾 台中市潭子区大豊路一段188-9号 42756
電話番号：+886-4-25341382